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Metal and alloy sputtering targets

Metal and alloy sputtering targets

Material

Purity

Shape

Max. Size

Aluminum

3~5N

   

 

Discs, Rectangle, Step, Plates, Sheets, Rods

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

1000x300mm

Al-Si alloy

4N, 5N

1000x300mm

Al-Cu alloy

5N

1000x300mm

Al-Si-Cu alloy

5N

1000x300mm

Al-Ti alloy

4N

1000x300mm

Al-Mg alloy

3N5~4N

350x150~200mm

Al-Mg-Si alloy

3N5~4N

350x150~200mm

Silver

4N

1000x300mm

Ag-Cu alloy

4N

1000x300mm

 Ag-Pd alloy

4N

800x300mm

Gold

4N

800x300mm

Au-Ge alloy

4N

Φ300mm

Au-Ge-Ni alloy

4N

Φ300mm

Bismuth

4N

400x200mm

Carbon

2.5~3N

600x300mm

Cadmium

2.5~4N

800x300mm

Cobalt

3N

800x300mm

Co-Cr alloy

2N5-3N

200~400x200~300mm

Co-Ni alloy

3N

400x300mm

Co-Fe alloy

3N

400x300mm

Co-Fe-B alloy

3N

Φ101.6mm

Co-Fe-Cu alloy

3N

400x300mm

chromium

2.5~3N

500x200mm

Cr-Si alloy

3N

Φ101.6mm

Copper

4N

1000x300mm

Cu-Mn alloy

4N

200~400x200mm

Cu-Co alloy

3N~3N5

400x300mm

Cu-Ni alloy

3N~3N5

400x300mm

Cu-Al alloy

3N~4N

400x300mm

 Cu-Ga alloy

3N5~4N

400x300mm

Cu-In-Ga alloy

3N5~4N

400x300mm

Iron

2N5-4N

1000x300mm

Fe-Mn alloy

2.5N

200~400x200mm

Fe-Ni alloy

2N5-3N

1000x300mm

Fe-Co-B-Si alloy

2.7N

Φ101.6mm

Germanium

4N~5N

Φ101.6mm

Hafnium

3N

500x200mm

Indium

4N

800x300mm

In-Sn alloy

4N

800x300mm

In-Sb alloy

4N

Φ150mm

Iridium

3N

300x200mm

Magnesium

3N~4N

500x300mm

Manganese

2N5

Φ30mm

Molybdenum

3N

500x300mm

Nickel

3~3.5N

1000x300mm

Ni-Cr alloy

3N

1000x300mm

Ni-Mn alloy

2N5

200~400x200mm

Ni-Cr-Si alloy

3N

200~400x200mm

Ni-Cr-Fe alloy

3N

500x300mm

Ni-Fe alloy

3N

600x300mm

Ni-V alloy

3N

1000x300mm

Ni-Pt alloy

3N~3N5

200~400x200mm

Ni-Al alloy

3N~4N

200~400x200mm

Lead

3N, 4N

800x300mm

Palladium

3N5

500x300mm

Platinum

3N5

500x300mm

Rhodium

3N

Φ101.6mm

Ruthenium

3N5

Φ101.6mm

Silicon

4N

Φ101.6mm

Si-Al alloy

4N

200~400x200mm

Tin

3~5N

1000x300mm

Tantalum

3N5

1000x300mm

Titanium

2.5~3N

1000x300mm

Ti-Si alloy

2N5

Φ101.6mm

Ti-Al alloy

2N5

200~400x200mm

Ti-Al-Y alloy

2N5

200~400x200mm

Ti-Ni alloy

2N5~3N

500x300mm

Ti-Zr alloy

2N~2N5

300x300mm

Vanadium

2N5~3N

500x300mm

Tungsten

3N5

500x300mm

W-Si alloy

3N

Φ101.6mm

W-Ti alloy

2N5

Φ101.6mm

Zinc

3N~4N

800x300mm

Zn-Al alloy

3N5~4N

800x300mm

Zirconium

2N4~2N8

300x300mm

Zr-Y alloy

2N

300x300mm

 

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